Expanded Triaxial MEMS Capacitive Accelerometer Offerings


Triaxial MEMS capacitive accelerometers from Silicon Designs are low-cost, integrated plug-and-play devices for zero-to-medium frequency commercial, industrial and test and measurement requirements. They excel in applications where low noise and long-term stability are absolute requirements. A typical non-linearity specification of only 0.15% FS facilitates reliable and consistent accelerometer performance. Typical bias and scale factor temperature shifts are zero, with typical bias and scale factor calibration errors under 0.5%. In addition, as the OEM of its own surface mount MEMS capacitive accelerometers, the Silicon Designs R&D team has successfully achieved a reduced noise specification of 10 μg/√Hz (typical) on all of its 2 g FS units.

Silicon Designs triaxial MEMS capacitive accelerometer modules are offered in standard ranges from ±2 g to ±400 g. Within standard range, most models can continue to operate after sustained exposures of up to 1000 g and with limited temperature exposures of +150°C or greater. They support both ±4V differential and 0.5V to 4.5V single ended outputs. Their robust design incorporates three orthogonally mounted low noise single axis accelerometers within a single rugged, epoxy sealed anodized aluminum case. Onboard voltage regulation and an internal voltage reference eliminate the need for precision power supplies. They are also relatively insensitive to temperature changes and gradients. The case is epoxy sealed and is easily mounted via two #8 (or M4) screws, adhesive, or by attaching a magnet. An initial calibration sheet and periodic calibration inspection are also available.

For more than 30 years, Silicon Designs has specialized in the design, development and manufacture of high-reliability MEMS capacitive accelerometer chips and modules. All products are 100% designed and manufactured in the USA, from the company’s headquarters near Seattle, Washington. Carefully regulated manufacturing processes ensure that each sensor is made to be virtually identical, allowing users to swap out parts in the same g range with few to no testing modifications, further saving time and resources. This also provides test engineers with a quick plug-and-play solution for almost any application, with total trust in sensor accuracy when used within published specifications. Typical applications for Silicon Designs triaxial MEMS capacitive accelerometer modules include inertial measurements, robotics, seismic studies, crash event detection, missile launches, downhole vibration, automotive testing, motorsport, shipping container monitoring, airplane flutter testing, turbine engine precession, and structural integrity monitoring. For detailed product specifications, pricing, or applications assistance, please visit www.silicondesigns.com.

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